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Particulate Contamination of a LPCVD Production Reactor

Problems encountered

Substrates contaminated by solid particles, leading to a decline in productivity.

Objective

Increase productivity.

Solutions

  • Examine the reasons for substrate contamination. The complex nature of the furnace and the influence of gravity (natural convection, particle weight) call for a 3D simulation.
  • Optimisation of pumping and filling conditions.
This study was carried out in association with ALCATEL VACUUM TECHNOLOGY France

 
This type of study was applied to the following processes: "nitride", "poly", "TeOs"
 
This study was carried out in association with ALCATEL VACUUM TECHNOLOGY France
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