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Annealing furnace heated by induction

Problem encountered

Designing a new furnace (increase in productivity) to comply with very stringent specifications - excellent thermal homogeneity .


Objective
Successfully produce the furnace the first time round - control development costs and predict output of the new furnace.


Solutions
  • Optimisation of thermal homogeneity by modification of the shape of the graphite furnace.
  • The temperature calculation is done by magneto-thermal coupled simulation in axisymetric 2D.
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    This study was conducted by IRIS TECHNOLOGIES.

    New furnace :
    4 wafer.

           

    First Geometry:             Old Furnace:

    poor homogeneity       1 wafer.


     
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